Model (Vision): Gatan Solarus 950

Installation date: Feb, 2015 

Specifications 

Available gas: H₂, O₂ and Ar

Plasma recipes: H₂/O₂, Ar/O₂ 

Chamber: 3.5” in diameter x 2.0” deep

Applications

The Solarus 950 automatically manages all critical plasma parameters, e.g. vacuum, gas flow, RF supply, offering a reliable one-touch cleaning solution. With this system, every user can obtain consistent, high quality results.